• Chemistry and Materials
  • Digital World and Robotics

Micro-Nano Manufacturing Center (CMNF)



Our platform enables the fabrication of advanced components and systems in various fields such as (bio)MEMS, photonics, power components, high frequency/high throughput devices, micro-energy or acoustics. It is one of the 5 major French academic centers. Our expertise is recognized nationally and internationally in various fields such as electronic lithography or ion implantation. Composed of about twenty qualified engineers and technicians working in close collaboration with researchers, our team works on the most ambitious projects related to micro and nanotechnologies. We are structured around major areas of expertise: Growth and deposition of thin films, Lithography, Etching, Ion Implantation, Process Characterization, Assembly-Prototyping, and BioMicrofluidics. As a member of the RENATECH network (national network of large-scale micro-nanofabrication facilities), we can respond to any request for the development of technological components or the fabrication of devices from other companies or institutes.


  • Christophe Lethien
    Deputy director
  • Bertrand Grimbert
    Technical manager


Avenue Henri Poincaré
Campus Cité scientifique


Chiffres clés

• 150 users / year
• 550 visits / year
• 220 projects, 34% of industrial projects
• 108 academic partners
• 48 industrial partners


Effectif total : 18



• Micro-devices and electronic components
• Deposition of materials, structuring of these materials by lithography / etching and in-line analysis
• Thin film deposition (metals, oxides, nitrides) by PVD (physical vapor deposition) and CVD (Chemical Vapor Deposition: AP CVD, LP CVD, PE CVD)
• Atomic layer deposition by thermal ALD and plasma
• Biomicrofluidics
• Soft lithography
• Optical and electronic lithography
• Chemical etching / Physical plasma etching / Ion implantation
• Epitaxial growth by Molecular Beam Epitaxy
• Laser structuring

Example(s) of projects

• Power transistor
• Photonic emission and reception components
• RF and THz components
• Microsource of energy

Collaborations/Partners/Scientific clients

INSA Lyon, Institut de Chimie et des Matériaux Paris-Est (ICMPE), Institut de Minéralogie, de Physique des Matériaux et de Cosmochimie (IMPMC), Chimie des processus biologiques - Collège de France, Institut Jean Lamour, Institut de Physique Nucléaire de Lyon, Université Claude Bernard Lyon, Université du Littoral Côte d'Opale, Université Montpellier


Services offers

Applications sectors

  • Networks / Telecom
  • Biotechnology
  • Energy
  • Defence
  • Aeronautics / Aerospace
  • Automotive industry
  • Electronic / photonics
  • Education / Training
  • Materials (Metal, Glass, Ceramic, Composite...)
  • Science / Research
  • Railway industry
  • Textile / clothing industry

Services provided

• Technological manufacture of micro-devices and electronic components
• Manufacture, characterization and use of biomimetic devices (microfluidic equipment, etc.)
• Material deposition (by evaporation, by sputtering, by atomic layer, thermal deposition, plasma deposition at
low temperature)
• Inkjet printing
• Growth of III-V materials (Ga, As, Sb, ...)
• Material characterization
• Structuring of materials by lithography / etching and in-line analysis
• Optical lithography
• Electronic lithography
• Chemical etching
• Inductive plasma etching
• Reactive ionic etching
• Assembly-Assembly
• Prototyping and development of demonstrators

Training offers

Training on specific equipment

Consulting services

We provide consulting services related to all our areas of expertise.


The CMNF platform covers 1600m² of ISO6 certified clean room and an additional 260m² dedicated to the back-end. The center has a wide range of equipment ranging from the basics of the semiconductor industry to advanced micro-nanofabrication equipment. The total value of the equipment is approximately €30 million and includes equipment dedicated to specific stages of the technological process: laser lithography tools, electron beam equipment, deep engraving equipment, processing chambers, ion implanter, evaporation and sputtering tools, tube furnaces, optical microscopes, high resolution microscopes, polishing equipment, wafer cuts, welds and many more.

See the detailed list of equipment: http://lims.iemn.fr/WebForms/Equipment/EquipmentList.aspx


Nom Modèle Marque
LPCVD furnace
Graphene growth oven Jetfirst 100F/
Inkjet printer
Metal deposition machine
TEPLA plasma system
Mechanochemical polisher
Digital machining center


Affiliated institutions / organisations

Centrale Lille
Université Polytechnique Hauts-de-France (UPHF)

Unit(s) of attachment


Competitive cluster


Regional strategic areas of activity

  • Chemistry and Materials
    • Coatings and surface treatments
    • Industrial processes engineering, efficient processes
  • Digital World and Robotics
    • Electronics